Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a system that uses an etched small diameter optical fiber as stylus to measure with low contact force. However, when the tip is less than few tens micrometers, surface forces between measured become larger gravity tip, causing stick surface. This adhesion leads increase time decrease accuracy. In this study, we fabricated high-function water-repellent antistatic coatings applied reduce due forces, conducted performance evaluation tests. As result, average separation distance was 13.8 µm fluorinated resin coating angle 105° used, confirming influence liquid bridge could be reduced by approximately 78%. Additionally, static elimination experiments were scanning charged at pitch 0.5 using gold on surface, adsorption 3.6 µm, effect electrostatic force 71%.